The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.Ebara Technologies is taking new strides in order to provide the best maintenance for process operation and has created an innovative design to heat Nitrogen gas to temperatures of up to 200C. With a flow capacity of 300 SLM, this is an excellent source of heated dilution gas for maintaining smooth operation.
Services
The Components Division supplies a wide range of products, services and applications assistance to the Semiconductor, R&D, University and Industrial and Chemical process industries. The Systems Equipment Division is the worldwide leading supplier of Chemical Mechanical Polishing (CMP), Advanced Wafer Plating systems, Bevel and Backside Cleaning Treatment Systems.
The Component Division of EBARA Technologies Inc. supplies advanced vacuum and abatement systems as well as other equipment focused on the needs of the semiconductor, photovoltaic and R&D sectors. Our industry-leading exhaust management solutions consist of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.
The Model EV-PA ultra-compact series of air cooled dry pumps. Oil free, energy efficient and with no annual maintenance requirements the pump is the perfect solution for replacing noisy and high maintenance scroll and wet oil pumps. The pump offers a low cost of ownership and higher return on investment (ROI).
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